Yttrium Oxide Sputtering Target

Cat No:PPFM-0078

Description

A high-purity rare-earth raw material used to deposit plasma-resistant thin films onto 3D printed ceramic components for semiconductor manufacturing tools.

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Basic Information

Material State	Solid
Color	White
Viscosity (cP)	N/A
Density (g/cm³)	5.01
Application Method	PVD Coating
Curing Mechanism	Vacuum Deposition
Surface Tension (mN/m)	N/A
Thermal Stability	2400°C
Shore Hardness	7 (Mohs)
Contact Angle (Water)	N/A
Solubility	Insoluble
Flash Point	Non-flammable
Shelf Life	Indefinite
Storage Temp	Room Temp
Tensile Strength	N/A
Flexural Modulus	N/A
Elongation at Break	N/A
Refractive Index	1.91
Electrical Resistance	Insulator
Moisture Absorption	<0.01%
Biocompatibility	Biocompatible
Functional Group	Rare Earth Oxide

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